A Modular Simulation System for Semiconductor Manufacturing Scheduling

نویسندگان

  • Li LI
  • Fei QIAO
چکیده

A modular simulation system (MSS) for the scheduling of semiconductor wafer fabrication facilities (fabs) is discussed. Firstly, the general structure model (GSM) for modeling a semiconductor wafer fab, composed of a configurable definition layer, a physical layer, a process information layer and a scheduling layer, is proposed. Secondly, a data-based dynamic modeling method is given. Thirdly, the architecture of MSS, composed of data layer, module layer and simulation layer, is presented. Finally, a case study is used to demonstrate the effectiveness of MSS. Streszczenie. Zaprezentowano Isystem symulacji modularnej do planowania produkcji w przemyśle półprzewodnikowym. Bazuje się na warstwach: fizycznej, technologicznej i planowania. Zaproponowano też model dynamiczny. System składa się z trzech warstw: danych, modułu i symulacji. (Modularny system symulacji do planowania w przemyśle półprzewodnikowym).

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تاریخ انتشار 2011